Abstract
Zn 1− x Cd x O films were successfully grown by remote plasma enhanced metalorganic chemical vapor deposition (RPE-MOCVD) with diethyl zinc, dimethyl cadmium, and oxygen plasma. The Cd composition x in the Zn 1− x Cd x O films was tuned by changing a flow rate of group-II sources. With increasing the Cd composition x, the crystal structure was changed from wurzite (WZ) to rock-salt (RS). The optical band-gap of the Zn 1− x Cd x O films with the wurzite structure up to x ≤ 0.7 varied from 3.3 eV down to 1.9 eV.
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