Abstract
Mg x Zn 1 − x O films were successfully grown on a-plane sapphire ( 1 1 2 ¯ 0 ) substrates by remote plasma enhanced metalorganic chemical vapor deposition (RPE-MOCVD). Diethyl zinc (DEZn), bis-ethylcyclopentadienyl magnesium (EtCp 2Mg) and oxygen plasma were used as source materials. By increasing Mg content in the films, the crystal structure was shifted through a mixed state from wurtzite to rock-salt with no significant segregation. Both optical absorption edges and emission peaks of Mg x Zn 1 − x O films shifted to the higher energy by increasing the Mg content at room temperature, showing an alloy broadening. The Stokes’ shift of wurtzite Mg x Zn 1 − x O alloy films was quantitatively evaluated, resulting in a linear dependence on the absorption edge energy.
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