Abstract
Si/4H–SiC heterostructures are synthesized with low pressure chemical vapor deposition at temperatures ranging from 700 to 1080 °C. Microstructural investigations comprise scanning and transmission electron microscopy, as well as X-ray diffractometry analyses. The Si<111> and Si<110> growth orientations are found to be the most dominant, with a strong influence from the deposition temperature. Almost only Si<110> oriented and closed Si films are found at a deposition temperature of 900 °C. At the latter deposition temperature and above, the Si growth is heteroepitaxial. Heterojunction diodes by p+ and n+ doping of the Si top layer are fabricated and characterized. Strong Fermi level pinning is found to be responsible for deposition temperature dependent Schottky barrier heights.
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