Abstract
Trivalent cerium<TEX>$(Ce^{3+})$</TEX> activated YAG (yttrium aluminum garnet, <TEX>$Y_3Al_5O_{12})$</TEX>) thin films phosphor were deposited on quartz glass substrates by rf magnetron sputtering. The effects of sputtering parameters, annealing atmosphere, and substrates on growing behaviors and luminescent properties were investigated. The sputtering parameters were <TEX>$O_2/(Ar+O_2)$</TEX> gas ratio, rf power, and deposition time. XRD (X-ray diffractometery) spectra exhibited that as-deposited films were amorphous, while they were transformed to the crystalline phases by post-annealing. The crystallinity and the atomic ratio strongly depended on the sputtering gas ratio <TEX>$O_2/(Ar+O_2)$</TEX>. High quality YAG:Ce thin films could be obtained at the gas ratio of <TEX>$50\%$</TEX> oxygen. After annealing process, PL (Photoluminescence) spectra excited at 450nm showed a yellow single band at 550nm. The films deposited at the sputtering gas ratio of 50% oxygen exhibited the highest PL intensity.
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