Abstract
Magnetic encoders are much advantageous for precision positioning specifically under harsh environments. The finer the magnetic pole-pitches of the magnetic scale in a magnetic encoder the higher the resolution of the encoder. In this paper, a grooved multi-pole magnetic grating (MPMG) is substituted for conventional non-structured magnetic scale. A MPMG with pole-pitch of 200 µm was prepared by photo-lithography and electro-deposition. Simulation was first done to attain the relationship among magnetic flux density, magnetic properties of electrodeposited alloy layers, magnetizing directions and the grating dimensions. The MPMG can be fully magnetized for use by just a single pulse in a solenoid coil. Magnetic properties were investigated in which CoNiP layers were electrodeposited under various current densities. Measured magnetic flux densities versus grating heights, magnetizing directions and detection gaps on magnetized MPMG validate the applicability of ultra-fine pitched MPMG.
Published Version
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