Abstract
This paper describes the design and realization of a heterodyne laser interferometer system that is applicable to metrology comparison. In this research, an iodine-stabilized Nd:YAG laser at 532 nm served as the light source. Two spatially separated beams with different offset frequencies are generated by two acousto-optic modulators to prevent any source mixing and polarization leakage. The interferometry components are integrated to a monolithic prism to reduce the difficulty of the light path adjustment and to guarantee the measuring accuracy. The experimental results show there is a sub-nanometer periodic nonlinearity, which mainly results from the ghost reflection. Placed in a vacuum chamber, the interferometer is applicable for measuring comparison using a piezo nanopositioner and a precision translation stage. Finally, a commercial interferometer is calibrated with the interferometer system.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
