Graphic data editor for Cambridge e beam

Abstract

Circuit research with e-beam exposure and new resist tests require a much greater data modification freedom than is possible by hand or cycling changes back through a CAD group. Developed for a Cambridge e-beam system is a graphics editor that runs directly on the e-beam’s computer and CRT display. The editor interactively changes rectangles, triangles, or trapezoids into any three or four sided polygon shape. Additions and deletions to the data file are easily done with a crosshair cursor of the display. Macrocommands create groups of data elements in any of the six data display levels and may be matrixed or positioned as desired. Existing data group structures may be modified as the program automatically redefines nested definitions up to ten levels deep. Particularly useful for the e-beam is scan field boundary detection with the scan field size variable up to 4 mm. Also, a switchable reference scale may be used to examine data or input commands in microns or the Cambridge’s internal data units. Further development will include proximity corrections selective to the area displayed to save the time required to do extensive calculations on noncritical areas.