Graphene/MoS2-Based Fix–Fix-Type RF-NEMS Switches––A Simulation Study

Abstract

In this work, modelling, simulation and analysis of a fix–fix-type RF- nanoelectromechanical switches (RF-NEMS) with very low actuation voltage and enhanced RF-Performance is presented. The switches are modelled using previously known theory from the literature. The various performance parameters are computed like modal frequencies, Casimir force, electrostatic force, capacitance, release time, actuation voltage and S-parameters are computed using ANSYS structural and HFSS software. The switch exhibits low actuation voltage <1 V for different thicknesses of graphene/MoS2 as a beam material. Resonant frequency of graphene based beam for first, second and third mode are found to be 72.5 kHz, 86 kHz and 416 kHz, respectively, while for MoS2-based beam 27 kHz, 34 kHz and 94 kHz, respectively. It is concluded that low actuation voltage NEMS switches can be realised using single-layer 2D material giving low insertion loss.