Design Considerations of in-Plane Nanoelectromechanical Switches with Corrugation Beams for Low Voltage Logic Applications

Abstract

Design consideration of nanoelectromechanical switches with low actuation voltage is presented. For a fixed-fixed beam structure design, it has been found that the actuation voltage can be largely reduced by integrating corrugations onto the fixed beam. An actuation voltage less than 3 V can be achieved with a relaxed design rule.