Abstract

Monolayer graphene has been grown on polycrystalline Ru thin films on SiO2/Si substrates. The Ru films have columnar structure with strongly aligned grains exposing flat (0001) surface facets. Adjacent grains show small relative tilts of their [0001] axes and variations in in-plane orientation. Graphene layers grown on this template cover the entire surface and have uniform monolayer thickness. Analysis of the graphene/Ru moiré structure shows that monocrystalline graphene domains are coherent across a large number of substrate grains. Hence, the size of monolayer graphene domains is not limited by grain boundaries in the metal template.

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