Abstract
Nanofabrication technology plays an important role in the performance of surface plasmonic devices such as extraordinary optical transmission (EOT) sensor. In this work, a double liftoff process was developed to fabricate a series of nanohole arrays of a hole diameter between 150 and 235 nm and a period of 500 nm in a 100-nm-thick gold film on a silica substrate. To improve the surface quality of the gold film, thermal annealing was conducted, by which an ultra-smooth gold film with root-mean-square (RMS) roughness of sub-1 nm was achieved, accompanied with a hole diameter shrinkage. The surface sensitivity of the nanohole arrays was measured using a monolayer of 16-mercaptohexadecanoic acid (16-MHA) molecule, and the surface sensitivity was increased by 2.5 to 3 times upon annealing the extraordinary optical transmission (EOT) sensor.
Highlights
Plasmonic devices such as plasmonic waveguide [1,2,3] and bio- or chemical sensors based on localized or propagating surface plasmon resonance [4,5,6,7] are based on nanostructured noble metal films including gold, silver, and platinum
We report the effect of thermal annealing on the performance of extraordinary optical transmission (EOT) sensor, as well as an efficient fabrication approach using electron beam lithography (EBL) followed by a double liftoff process
The last defect that was observed in the fabricated nanohole array (NHA) through a single liftoff process was the collapse of the resist pillars which was due to the capillary force and high aspect ratio of resist structure
Summary
Plasmonic devices such as plasmonic waveguide [1,2,3] and bio- or chemical sensors based on localized or propagating surface plasmon resonance [4,5,6,7] are based on nanostructured noble metal films including gold, silver, and platinum. Extraordinary optical transmission (EOT) device consisting of periodic nanohole array patterned in noble metal film has been an active research area both theoretically [8,9,10,11,12,13,14] and experimentally [15,16,17,18] since 1998 when EOT phenomenon was first observed [19]. The thin membrane is very brittle and breaks
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