Abstract
This work describes construction, technology, working principle and properties of an ion source dedicated to a miniature MEMS (Micro-Electro-Mechanical System) mass spectrometer. Conditions allowing efficient ionization of a gas sample, and obtaininga properly directed ion beam were determined. An influence of parameters such as shape, dimension and distance between the electrodes, as well as applied magnetic and electric field and pressure level, on the operation of this device were investigated. The experiment allowed choosing the optimal parameters, thus it may be concluded that the ion source will satisfy all the requirements necessary for the MEMS mass spectrometer.
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