Abstract
Glow discharge cleaning has been employed successfully in the CERN ISR to eliminate beam induced pressure bumps and had been adopted as a final surface treatment for the beam vacuum system of CBA. A glow discharge cleaning facility for beam tubes up to 5.5 m in length has been constructed and is in operation. To ensure efficient and thorough cleaning of the long tubes, a residual gas analyzer was used to monitor the exhaust during cleaning. Quantitative studies of the glow discharge process were performed on several tubes by using Ar or Ar/O2 mixture (0.1 to 10 Pa) and by varying the discharge density (≤30 μA/cm2). The results of the studies, such as the desorption yields of H2O, CO, and CO2 with respect to the accumulated dosage, the depletion of O2 in Ar/O2 mixture, will be reported here. The effect of venting to air and CO2, as well as plasma deposition of carbon will also be discussed.
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More From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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