Abstract
A mathematical Model is developed to evaluate the influence of operating parameters on hydrogen dissociation and the nature of the major species present in Ar/H2 plasmas. The Boltzmann equation is solved to obtain the electron energy distributions. Mass and energy conservation equations are then solved simultaneously to calculate the species density and electron temperature as a function of pressure, power, and feed composition. Good agreement is found between the model results and experimental measurements. The primary effect of argon addition to hydrogen plasma is to increase the electron density, which in turn enhances the degree of hydrogen dissociation. It is also found that Ar/H2 plasma retains the basic properties of hydrogen plasma even for feed gases containing more than 70% argon. That is, values of electron temperature and H-atom density are similar, and the dominant ionic species is H3+ ion.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of the Chinese Institute of Chemical Engineers
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
