Abstract
Eliminating dust is gaining importance as a critical requirement in the display panel manufacturing process. The pixel resolution of display panels is increasing rapidly, which means that even small dust particles on the order of a few micrometers can affect them. Conventional surface cleaning methods such as ultrasonic cleaning (USC), CO2 cleaning, and wet cleaning may not be sufficiently efficient, economical, or environment friendly. In this study, a laser shockwave cleaning (LSC) method with a 233 fs pulsed laser was developed, which is different from the laser ablation cleaning method. To minimize thermal damage to the glass substrate, the effect of the number of pulses and the gap distance between the focused laser beam and the glass substrate were studied. The optimum number of pulses and gap distance to prevent damage to the glass substrate was inferred as 500 and 20 μm, respectively. With the optimal pulse number and gap distance, cleaning efficiency was tested at a 95% removal ratio regardless of the density of the particles. The effective cleaning area was measured using the removal ratio map and compared with the theoretical value.
Highlights
Eliminating dust is gaining importance as a critical requirement in the display panel manufacturing process
Process particles were observed by scanning electron microscope (SEM)the images and energy disBefore analyzing thermal damage inin the process, glass substrate and SiO2 parBefore analyzing(EDS)
6.process, The glassthe substrate with a 300 and SiO2 ticles were observed by scanning electron microscope (SEM)
Summary
Eliminating dust is gaining importance as a critical requirement in the display panel manufacturing process. Physical cleaning methods utilizing the waterjet, ultrasonic, or megasonic cleaning, and brush methods, which involve the application of various physical forces to the glass panel, can detach dust from the panel [3,4,5,6]. Another cleaning method is the chemical cleaning method and it involves the application of a chemical solution mixed with Deionized water to the glass substrate, which melts the dust and surface of the glass substrate together [7]. The resolution of the display panel pixel was on the order of 10 μm, but newer organic light-emitting diode (OLED) or micro light-emitting diode (MicroLED) panel pixels are much smaller [8], and conventional physical cleaning methods cannot detach exceedingly small dust particles
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