Gigapixel confocal imaging using a massively parallel optical probe array with single directional infinite scanning

Ryung Shin,Taekyung Kim,Shinill Kang,Runjia Han,Woojae Choi,Kyungjin Lee,Donghyun Kim,Nahyun Won

doi:10.1038/s41598-020-64602-3

Ryung Shin, Taekyung Kim + Show 6 more

Open Access

https://doi.org/10.1038/s41598-020-64602-3

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Abstract

Here we demonstrate high-throughput gigapixel confocal imaging using a massively parallel optical probe array with single directional infinite scanning. For implementation of the single directional infinite scan with high lateral resolution, a parallelogram array micro-objective lens module, composed of two wafer-level microlens arrays, is proposed to generate a massively parallel optical probe array for integration into the confocal imaging system, including an objective-side telecentric relay lens with a low-magnification. To test the feasibility of the proposed system with single directional infinite scanning, we designed and constructed a confocal imaging system using a parallelogram array of multi-optical probes with a massively parallel array size of 200 × 140. The constructed system provides a full width-half maximum lateral resolution of 1.55 μm, as measured by the knife-edge detection method, and a field-of-view width of 28.0 mm with a sampling interval of 1 μm/pixel.

Highlights

We demonstrate high-throughput gigapixel confocal imaging using a massively parallel optical probe array with single directional infinite scanning
An imaging system using a parallelogram array multi-optical probe (Pa-MOP) can acquire optical information corresponding to the width of the transverse direction of a lens array with single directional infinite scanning
A single directional infinite scanning method is proposed, as shown in Fig. 1(a), which has a large-area imaging system using a multi-optical probe generated by a microlens array

Summary

Introduction

We demonstrate high-throughput gigapixel confocal imaging using a massively parallel optical probe array with single directional infinite scanning. For implementation of the single directional infinite scan with high lateral resolution, a parallelogram array micro-objective lens module, composed of two wafer-level microlens arrays, is proposed to generate a massively parallel optical probe array for integration into the confocal imaging system, including an objective-side telecentric relay lens with a low-magnification. We demonstrate a high-throughput, gigapixel confocal imaging system using massively parallel multi-optical probes with single directional infinite scanning. A parallelogram array micro-objective lens module (Pa-μOLM) composed of two microlens arrays based on a PA-MOP was designed for integration into a multi-optical probe confocal imaging system. The Pa-μOLM can be adjusted to the sampling interval in the transverse or scanning direction, by arranging the microlens and synchronizing the sample moving speed with the image acquisition frequency of the camera, making it suitable for application to large-area, high-throughput inspection systems

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