Abstract
Lead‐free Ba0.85Ca0.15Ti0.90Zr0.10O3/SrRuO3 (BCZT/SRO)‐heterostructured thin film grown on (001)‐SrTiO3 substrate is prepared by pulse laser deposition. The microstructure, ferroelectric, and piezoelectric of the thin film are investigated in detail. Giant ferroelectric properties of the BCZT thin films with thickness ≈100 nm and remanent polarization Pr of 57.1 μC cm−2 are obtained, which are attributed to the (00L)‐oriented epitaxial structure and lower substrate clamping. In addition, the BCZT/SRO heterostructure exhibits excellent piezoelectric properties with the d33 values of different grain size (40–140 nm) varied from 75 to 130 pm V−1, providing a potential candidate used as piezoelectric material for magnetoelectric composite films. The BCZT/SRO‐heterostructured thin film with excellent ferroelectric and piezoelectric properties may be a good alternative to Pb(ZrxTi1−x)O3 thin films for piezoelectric device applications.
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