Abstract

The Ge1-xCx/DLC antireflective and protective coating was designed and deposited on the ZnS substrate to improve the long-wave infrared transmittance, the hardness and the environmental adaptability of the ZnS window. The Ge1-xCx film and DLC film were deposited by ion beam sputtering and chemical vapor deposition, respectively. The surface morphology, chemical bonds and hardness of the films were investigated. The optical constants of the films were determined from whole infrared optical spectrum. After depositing hard protective coating and antireflective coating on ZnS substrate, the transmittance of the ZnS is greatly improve in the range of 7.5μm–9.7 μm, and the average value of transmittance is 90%. The hardness of the protective coating is 16 GPa, which is much higher than that of the ZnS substrate. The hard protective coating also shows good environmental adaptability. These results suggest that the coating has the potential to be used as an antireflective and protective coating in long-wave infrared region of 7.5μm–9.7 μm.

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