Abstract

A generalized numerical wave-front reconstruction method is proposed that is suitable for diversified irregular pupil shapes of optical systems to be measured. That is, to make a generalized and regular normal equation set, the test domain is extended to a regular square shape. The compatibility of this method is discussed in detail, and efficient algorithms (such as the Cholesky method) for solving this normal equation set are given. In addition, the authors give strict analyses of not only the error propagation in the wave-front estimate but also of the discretization errors of this domain extension algorithm. Finally, some application examples are given to demonstrate this algorithm.

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