Generalized structural-parametric model of electromagnetoelastic converter for control systems of nano- and micrometric movements: V. Multidimensional scheme

Abstract

On the basis of solution of the wave equation and taking into account deformations over coordinate axes, the multidimensional structural-parametric model and the parametric structural diagram of the electromagnetoelastic converter in the form of a piezodrive of nanomotions are constructed. The influence of geometric and physical parameters of the piezodrive and the external load on its static and dynamical characteristics and transfer functions is determined. The parametric structural diagrams of multicoordinate piezo converters are obtained.