Parametric Structural Schemes of Piezoactuators for Nano-and Micrometric Movements at a Longitudinal Piezoeffect

Abstract

Solutions to the wave equation and structural-parametric models of piezoactuators at a longitudinal piezoeffect were obtained. Effects of the geometric and physical parameters of the piezoactuators and external load on its static and dynamic characteristics were determined. The parametric structural schemes for piezoactuators for nano- and micrometric movements at a longitudinal pie-zoeffect were obtained. The transfer functions were determined. The parametric structural schemes and the transfer functions of the piezoactuators were obtained for calculation of the automatic control systems for nano- and micrometric movements with piezoac-tuators at a longitudinal piezoeffect. The static and dynamic characteristics of the piezoactuators were determined. Application of the piezoactuators solves the problems of precise matching in microelectronics and nanotechnology, compensation for the temperature and gravitational deformations, atmospheric turbulence by a wave front correction. By solving the wave equation with allowance for the corresponding equations of the piezoelectric effect, the boundary conditions on the loaded working surfaces of a piezoactuator, the strains along the coordinate axes, it is possible to construct a structural parametric model of a piezoactuator. The transfer functions and the parametric structural schemes of the piezoelectric actuator were obtained from the equations describing the corresponding structural parametric models of the piezoactuators for nano- and micrometric movements at a longitudinal piezoeffect.