Abstract
We report on using a generalized ellipsometry effective medium approximation approach to determine the changes of structural and optical properties of highly porous slanted columnar thin films upon polymer infiltration. The obtained film thickness and columnar slanting angle show a difference after infiltration, which are in good agreement with scanning electron microscopy analysis. The approach effectively identifies the changes in birefringence and dichroism upon infiltration, and provides constituent fractions consistent with the performed experiments. The approach presented here will become useful for optical characterization of slanted columnar thin films.
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