Abstract
A general lateral shearing interferometry method to measure the wavefront aberrations with a continuously variable shear ratio by the randomly encoded hybrid grating (REHG) is proposed. The REHG consists of a randomly encoded binary amplitude grating and a phase chessboard. Its Fraunhofer diffractions contain only four orders which are the ±1 orders in two orthogonal directions due to the combined modulation of the amplitude and phase. As a result, no orders selection mask is needed for the REHG and the shear ratio is continuously variable, which is beneficial to the variation of sensitivity and testing range for different requirements. To determine the fabrication tolerance of this hybrid grating, the analysis of the effects of different errors on the diffraction intensity distributions is carried out. Experiments have shown that the testing method can achieve a continuously variable shear ratio with the same REHG, and the comparison with a ZYGO GPI interferometer exhibits that the aberration testing method by the REHG is highly precise and also has a good repeatability. This testing method by the REHG is available for general use in testing the aberrations of different optical systems in situ.
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