<title>Three-dimensional profilometry using hybrid grating projection</title>

Abstract

This paper describes a grating projection method for the measurement of surface profiles of objects. In this kind of profilometry, a grating with binary transmittance distribution has been utilized usually. And in these cases such a problem is known as an error is caused due to the non-sinusoidal transmittance distribution of the grating. And another difficulty is also indicated that shifting of the grating is given by mechanical movement of the grating. Here we propose to use a hybrid grating is given by mechanical movement of the grating. Here we propose to us a hybrid grating which consists of a conventional binary grating and a liquid crystal binary grating. Then moire pattern is produced by superposing these two binary gratings. When two binary gratings are overlapped with an appropriate gap, the resultant more pattern becomes closely sinusoidal in intensity distribution. The, in the optical arrangement for profile measurement using this hybrid grating, when the LC gratin pattern is moved, the projected pattern is shifted arbitrarily in phase. Surface profiles of some samples are measured to show validity of the more pattern projection and utility of the prototype system.