Abstract
Fundamental characteristic features of the maintenance electric fields for radio frequency (RF) discharges between a pair of planar electrodes were disclosed theoretically by solving a quasistatic linear Laplace equation in a stationary state. The phase and amplitude properties for the fields in plasma and dielectrics (or sheaths in equivalence) were represented in several universal forms. The plasma was assumed to be uniformly produced between electrodes. The present theory is based on an unique interpretation for the RF plasma production that arises from a geometrical resonance of electron plasma oscillation. The theory may be applicable for wide ranges of gas pressures and RF frequencies.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
