Fundamental Solutions for Radio Frequency Discharges between Dielectric-Covered Parallel-Plate Electrodes*

Abstract

Fundamental solutions for radio frequency (RF) discharges between parallel-plate electrodes were obtained theoretically using a quasi-static linear Laplace equation, in particular, the produced plasma density and the minimum RF threshold voltage for maintaining the plasma. In this theory, the plasma was assumed to be uniformly produced between electrodes, and each electrode was completely covered by a dielectric. The theory shows that the mechanism for RF discharges arises from a geometrical resonance of electron plasma oscillation. The phase and amplitude properties for electric field in plasma were also deduced qualitatively from this theory. This theory may be applicable for wide ranges of gas pressure and RF frequency.