Abstract

This article describes the use of a semiconductor gas sensor for disease diagnosis that may potentially serve as diagnostic tool handheld breath analyzer to provide detection device. Tri metal oxides were fabricated by a modified chemical spray pyrolysis technique by the mixing of tungsten and tin salts composition at (1:1, 3:1) respectively, with a concentration of (0.1M). The substrate used was silicon n-type at a temperature (500 ºC ±5), with spray distance (25 cm). Structural properties, including x-ray diffraction XRD, scanning electron microscopy SEM and atomic force microscopy AFM, were examined. Moreover, the gas sensing property toward nitrous oxide NO2 gas at a concentration of (10) ppm in air was investigated. Experimental results show formation of tri-metal oxide film (α-SnWO4) with wire and rods structures were achieved from the used salts, which make the sensor suitable for the detection of nitrous oxide levels in the exhaled human breath.

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