Abstract
After a general comparison of optical to non-optical diagnostics in MOVPE reactors, this paper describes in more detail the advantages and disadvantages of different optical techniques (e.g. absorption spectroscopy, laser induced fluorescence, Raman scattering, coherent anti-Stokes Raman scattering, opto-galvanic detection). Two main examples of gas phase diagnostics obtained by coherent anti-Stokes Raman scattering are then treated at length. The first deals with thermal stimulated growth and discusses gas phase and surface reactions of AsH 3, Ga(CH 3) 3 and C 4H 9PH 2. The second example describes time resolved studies performed on the excimer laser induced photodecomposition of AsH 3 by using an excite and probe technique.
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