Abstract
Diamond film deposition studies were carried out in a microwave plasma reactor using feed gases containing methane and acetylene with one reagent labeled with carbon‐13. Stable gas‐phase species and their carbon‐13 content were characterized by downstream mass spectrometry. Raman spectroscopy along with curve‐fitting analysis was used to determine the carbon‐13 content of diamond and the sp2 carbon impurity. Diamond and the sp2 carbon impurity originated predominantly from methane and/or methyl radical, as opposed to acetylene. Thus, it appears that the differentiation between diamond and sp2 carbon formation occurs on the growth surface, and not in the gas phase.
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