Abstract
The laser-induced decomposition of WCl6 in the gas-phase is investigated by means of absorption, Raman and laser-induced fluorescence spectroscopy. With visible Ar+-laser radiation dissociation of WCl6 into WCl4 and Cl2 has been observed. Further decomposition can be achieved in the presence of H2 employing ultraviolet Ar+-laser radiation at 360 nm. A complete reduction to W requires even shorter wavelengths. The experimental results are analyzed on the basis of model calculations. Implications on the Laser-induced Chemical Vapor Deposition (LCVD) of W are discussed.
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