Abstract
The ion temperature in N 2/Ar and O 2/Ar electron cyclotron resonance (ECR) plasma is measured by high-resolution optical emission spectroscopy for pressure of 0.27 Pa and microwave power of 2.4 kW. It is found that as the nitrogen gas concentration is increased, the ion temperature in N 2/Ar ECR plasma decreases drastically and the uniformity of the radial electron density distribution improves. It is considered that the decrease of the ion temperature in N 2/Ar ECR plasma is caused by the decrease of the radial electric field. In the case of O 2/Ar ECR plasma, the ion temperature increases as the oxygen gas concentration is increased. It is considered that the increase of the ion temperature in O 2/Ar ECR plasma is caused by energy exchange between electrons and ions because the electron temperature considerably increases with increasing of the oxygen concentration.
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