Abstract

One of the major challenges with a nitric oxide (NO) gas sensor is the development of a facile and robust room temperature gas sensor for fast recovery and high response in an NO ambient, especially below ppb-level. In order to detect an NO gas in ppb-level, a Zr3N4 based gasistor with very sensitive conducting filaments was investigated. The proposed gasistor showed a high response of 25.8 for the NO of 500 ppb, a fast recovery within 1.6 μs in a pulse mode, and a measurement limit of 37 ppb for NO gas at 21°C. In addition, in the NO, O2, and C2H6 mixture gas test, we observed the feasibility of the selective detection of NO gas of the proposed gasistor. Therefore, we believe that the proposed gasistor has huge potential for NO gas sensing, which will revolutionize in the NO gas-sensor industries.

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