Abstract
This study represented a preparatory effort to improve understanding of contamination from cleanroom garments worn in the microelectronic and semiconductor industries. Previous research pertaining to cleanroom garments and particle contamination was assembled, and users and suppliers of cleanroom garments were surveyed to identify and categorize currently worn and desired future garments. The research review exposed the diversity of laboratory and garment wear study testing taking place and identified a critical need for industry-wide testing methods and standards to evaluate cleanroom garments. Survey data provided information as to what garments are currently worn in the work environment and pointed to garment comfort as a future research and development effort.
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