Abstract
AbstractGallium Phosphide (GaP) Metal-Insulator-Semiconductor (MIS) capacitors were fabricated with synthesized SiN as the gate dielectric. The interface property and the SiN bulk quality were studied with capacitance-voltage (C-V) measurements and current-voltage (I-V) measurements. The total interface state density of 3×1012 cm-2 and the fixed charge density in SiN of 7×1012cm-2 were estimated from the C-V measurements. The leakage current density was as low as 15nA/cm2 at an effective electric field of 3MV/cm. The effective electric field in SiN at breakdown was as high as 10MV/cm. Constant current stress measurements showed bulk trap density of 2×1011 cm-2 in SiN, which is much lower than that for CVD SiN or SiO2.
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