Abstract

In this chapter, we provide a brief review of the optical and electrical pumped GaN based vertical-cavity surface-emitting lasers from the fabrication technology to output characteristics analysis. Three types of vertical cavity surface-emitting laser (VCSEL) structures are discussed in the following paragraph including their pros and cons among design and process difficulties. First type is fully epitaxial VCSEL structure, second one is the hybrid microcavity consists of a bottom epitaxial distributed Bragg reflector (DBR) and a top dielectric DBR, and third one is vertical resonator composes dielectric top and bottom DBR. We also present several examples of GaN-based VCSELs achieve laser action under optical and electrical pumping at room temperature.

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