Abstract
Main objective of the presented work deals with design, modelling and characterization of new micro machined GaAs and GaN based hot plate thermal converters, which are considered to operate with high temperature metal oxide gas sensors, that can analyse various gases, such as CO, H2, NOx and hydrocarbons. The thermal and mechanical properties of GaAs and GaN based hot plates are compared with Silicon based hot plate. A new GaN based suspended membrane-type hot plate MEMS processing technology was developed for operationg temperature range up to 1000°C. The processing technology is also well-suited with the GaAs and GaN MESFET or HEMT devices, which enable integration of signal processing electronics into one chip with the MEMS gas sensors.
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