Abstract

We have studied the heteroepitaxial growth of GaAs on Ge substrates by metal-organic chemical vapor deposition (MOCVD). Different growth conditions and substrate orientations were employed to examine the properties of GaAs grown upon Ge substrates, and in particular the GaAs/Ge interface. The interface properties were found to strongly depend on growth conditions. By small changes in the growth temperature, the GaAs/ Ge interface was altered from active to passive. Only a narrow temperature window (600 to 630° C) for the initial GaAs layer growth gave the passive-Ge junction together with good surface morphology. Accordingly, a high efficiency (19%, AMO) GaAs solar cell was grown by atmospheric pressure MOCVD on a Ge substrate without any junction in the Ge.

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