Abstract
用于垂直腔面发射激光器的GaAs/AlGaAs的ICP刻蚀工艺研究
Published Version
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https://doi.org/10.3788/cjl202047.0401005
Copy DOIJournal: Chinese Journal of Lasers | Publication Date: Jan 1, 2020 |
用于垂直腔面发射激光器的GaAs/AlGaAs的ICP刻蚀工艺研究
Join us for a 30 min session where you can share your feedback and ask us any queries you have
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