Abstract
Methods for enhancing grip performance of micro-tweezers are examined in terms of friction force. Two items are examined experimentally. One is a method for increasing coefficient of friction on handling part of the micro- tweezers. We examined relation between surface roughness processed by Bosch process and the coefficient of friction changing etching time. It is found out that the coefficient of friction become large by optimizing etching time. The other item is about optimum handling force. In tweezers-type handling, it is not clear whether the friction force is proportional to the handling force as Coulomb's law of friction. By measuring the relation, it is found out that the friction force is approximately proportional to the handling force. From this characteristic, optimum handling force is easily determined.
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