Abstract
A method for separating linear and nonlinear components in high-resolution transmission electron microscope imaging has been reported by Chang (Microscopy, 2016. 65: p. 465–472), and a deep understanding has been obtained as to the variation of the linear and nonlinear components with the sample thickness. However, the images used for the separation in the abovementioned study are simulated under ideal conditions, without considering errors in experiments. Therefore, in this study, to verify the practicability of the abovementioned method, experimental details will be systematically considered, such as image mismatch, inaccuracy of the spherical aberration, focus, and residual highfold aberrations A2, B2 etc., based on the AlN simulated image, to determine the margin of error of the abovementioned parameters and provide theoretical guidance for experiments.
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