Abstract
Miniaturization of solid electrolyte gas sensors to thin-film microdevices with microelectrodes meets the requirements to reduce weight, volume and energy consumption. A future trend is integration on silicon substrates. This survey deals with working and design principles of electrochemical micro gas sensors based on ionic conduction in thin-films. Associated aspects of properties and processing of solid electrolyte thin-films, electrochemistry of microelectrodes, chemical compatibility of materials, and mechanical and thermal stability of solid sate ionic microdevices are also discussed. Particular emphasis is put on selection criteria for electrolyte, electrode, and insulating materials that are compatible with silicon technology.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
