Fully integrated FBAR sensor matrix for mass detection

Abstract

A fully integrated Film Bulk Acoustic Resonator (FBAR) based mass detection sensor matrix was developed for label-free in-vitro DNA and protein diagnostics. A 64 pixels sensor matrix was post-processed on top of a CMOS readout circuitry at wafer level. A novel and patented resonance frequency detection method was developed. To our knowledge this is the first realized full integrated FBAR matrix sensor.