Fully integrable magnetic field sensor based on delta-E effect

Abstract

A fully integrable magnetic field sensor based on magnetic microelectromechanical systems is presented. The approach yields high application potential since it is compatible with standard micromachining techniques, operates at room-temperature, and provides high bandwidth and vector field capability. The demonstrator presented in this work consists of a tipless commercial atomic force microscope cantilever which is coated with an amorphous thin film layer of (Fe90Co10)78Si12B10. Amplitude and frequency of magnetic fields are measured via the modulation of the oscillation of the microcantilever via the delta-E effect of the FeCoSiB coating.