Abstract
As one of the core components of MEMS (i.e., micro-electro-mechanical systems), thin-film piezoelectric-on-silicon (TPoS) resonators experienced a blooming development in the past decades due to unique features such as a remarkable capability of integration for attractive applications of system-on-chip integrated timing references. However, the parasitic capacitive feedthrough poses a great challenge to electrical detection of resonance in a microscale silicon-based mechanical resonator. Herein, a fully-differential configuration of a TPoS MEMS resonator based on a novel structural design of dual interdigital electrodes is proposed to eliminate the negative effect of feedthrough. The fundamental principle of feedthrough suppression was comprehensively investigated by using FEA (i.e., finite-element analysis) modeling and electrical measurements of fabricated devices. It was shown that with the help of fully-differential configuration, the key parameter of SBR (i.e., signal-to-background ratio) was significantly enhanced by greatly suppressing the in-phase signal. The S-parameter measurement results further verified the effectiveness of this novel feedthrough suppression strategy, and the insertion loss and SBR of proposed TPoS resonators were improved to 4.27 dB and 42.47 dB, respectively.
Highlights
Along with the development of wireless and portable electronic systems, the need to shrink the size of the systems is on the rise
We propose a novel even-order width-extensional vibration thin-film piezoelectric-on-silicon (TPoS) mechanical systems (MEMS) resonator working in a fully-differential configuration to substantially suppress the undesirable electrical feedthrough posed by the presence of parasitic capacitive elements and to extract resonator parameters from raw measurements heavily buried in parasitic feedthrough
A unique design of a 206.8 MHz TPoS MEMS resonator working in even-order width-extensional vibration mode was proposed to cancel the parasitic capacitive feedthrough in this paper
Summary
Along with the development of wireless and portable electronic systems, the need to shrink the size of the systems is on the rise. We propose a novel even-order width-extensional vibration TPoS MEMS resonator working in a fully-differential configuration to substantially suppress the undesirable electrical feedthrough posed by the presence of parasitic capacitive elements and to extract resonator parameters from raw measurements heavily buried in parasitic feedthrough. This on-chip solution presents a more compact size because only one single device is required. The developed resonator successfully suppressed the feedthrough and achieved a higher SBR of 42.47 dB and lower insertion loss of 4.27 dB
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