Abstract
This paper reports a low phase noise 10MHz oscillator based on a lateral-extensional mode thin-film piezoelectric-on-silicon (TPoS) resonator. A novel design of interdigital electrodes is introduced to improve both the insertion loss and quality factor of the resonator. The average quality factor gets improved by 43% by this method. The equivalent circuit model of the fundamental lateral-extensional mode is analysed. An oscillator is also designed and manufactured. The whole circuit includes a single common emitter BJT amplifier, LC network filter, a phase shifting unit and a MEMS resonator. Tuning the phase shifter in the feedback circuit, the MEMS resonator works at the best operating point while the phase shifting of the peripheral circuit is 90°. With an operating input power around 0dBm, the resonator is not driven at its bifurcation point. Little nonlinearity is observed in the output waveform. The phase-noise is measured below −105dBc/Hz@100Hz, −135dBc/Hz@1kHz offset and the far-from-carrier noise reaches below −150dBc/Hz.
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