Full-wave modeling of micro-acoustofluidic devices driven by standing surface acoustic waves for microparticle acoustophoresis

Abstract

Surface acoustic wave (SAW)-based acoustofluidic systems are emerging as an important tool for acoustophoresis. In this paper, we present a full cross-sectional model of standing SAW acoustofluidic devices for obtaining full-wave results. Our model involves a piezoelectric substrate with interdigitated electrodes and a rectangular water channel enclosed in a finite soft elastic solid. This model accounts for piezoelectric SAWs with electromechanical coupling, simultaneous transverse and longitudinal wave fields in the elastic solid from SAW radiation, and acoustic and streaming fields in the enclosed water channel in an integrated system by solving the elastodynamic and Navier–Stokes field equations. Accordingly, the acoustic radiation force and streaming-induced Stokes drag force are obtained to analyze the acoustophoretic motion of microparticles of different sizes. Using the full-wave results, we reveal the influences of the channel wall displacements and acoustic and flow fields in the water domain. The full-wave field also allows us to determine the effects of the channel dimensions and its location in the finite elastic solid on the force strengths. We demonstrate that the critical diameter of the microparticles can be reduced by an order of magnitude by changing the channel location, while maintaining the same acoustic frequency. We note that the results, mechanisms, and method presented in this study can be usefully applied to the rational design of standing SAW acoustofluidic devices and for developing innovative acoustophoretic systems involving complex structure–fluid interactions.