Abstract
Direct imaging with secondary ions versus scanning with an ion probe have been considered from the transmission and lateral resolution standpoints. Ions emitted from an object point are focused by an immersion lens into an aberration spot. The illumination in the spot (spread function) has been computed, taking into account the energy distribution of secondary ions and the upper limit 03A6om the lateral initial energy fixed by a material stop in the plane of the crossover. Transmission and spatial resolving limit have been evaluated versus 03A6om for a given energy bandwidth. The results are compared to those obtained with an ion probe when the objective lens is working simply as a collecting system. The gains in transmission are evaluated in relation with limitations introduced by the spectrometer according to the mass resolving power being used.
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