Abstract
In this work, diamond-like-carbon (DLC) films were deposited onto polycarbonate (PC) substrates by radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD), and silicon films were prepared between DLC and PC substrates by magnetron sputtering deposition so as to improve the adhesion of the DLC films. The deposited films were investigated by means of field-emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Subsequently, the following frictional and optical properties of the films were measured: the friction coefficient by using a ball-on-disk tribometer, the scratch hardness by using a nano-indenter, the optical transmittance by using a UV/visible spectrometer. The effects of incident power upon the frictional and optical properties of the films were investigated. Films deposited at low incident powers showed large optical gaps, which decreased with increasing incident power. The optical properties of DLC films correlated to the sp2 content of the coatings. High anti-scratch properties were obtained at higher values of incident power. The anti-scratch properties of DLC films correlated to the sp3 content of the coatings.
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