Optical properties of diamond‐like carbon films irradiated by X‐ray photons

Abstract

AbstractAmorphous diamond like carbon (DLC) films deposited at room temperature on quartz glass wafer by means of direct ion beam deposition method from acetylene gas or hexamethyldisiloxane (HMDSO) vapour mixture with hydrogen and nitrogen gas were irradiated by high energy X‐ray photon and the optical properties of irradiated DLC films were investigated. Ionizing radiation induced modification of optical properties of the DLC films of different type were studied using UV–VIS spectrometry, laser ellipsometry, Raman and IR spectroscopy, and interpreted on the basis of the obtained results. It was found, that the irradiation of amorphous hydrogenated DLC films introduced significant changes in the investigated structures; however the properties of SiOx containing DLC films remained almost stable after their exposure with high energy X‐ray photons. The influence of film deposition conditions and co‐doping on the optical properties of irradiated DLC films and the role of hydrogen in the films are discussed. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)