Abstract
We present the fabrication of Fresnel zone plates (FZP) by holography that yields FZPs completely free from imperfections such as zone placement errors and finite pixel size effects found in serial writing techniques such as e-beam lithography (EBL). Our holographic scheme is based on the interference of a spherical wave and a plane wave. A partially transparent membrane containing a pinhole is illuminated by a fully coherent plane wave (λ = 13.4 nm). The spherical wave, obtained by diffraction from the pinhole, interferes with the plane reference wave that is transmitted by the membrane. The interference pattern, which is a hologram of the pinhole, is recorded on a photoresist film and used to fabricate a FZP that has resolution similar to the size of the pinhole.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
